A remote laboratory for microelectronics fabrication

Mohtar, A.; Nedic, Z.; Machotka, J.; , "A remote laboratory for microelectronics fabrication," Frontiers in Education Conference, 2008. FIE 2008. 38th Annual , vol., no., pp.S2F-7-S2F-12, 22-25 Oct. 2008 doi: 10.1109/FIE.2008.4720477

2008