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Enabling Technology Scaling with In Production Lithography Processes
T. Jhaveri, A. J. Strojwas, L. Pileggi, V. Rover, "Enabling Technology Scaling with In Production Lithography Processes", Proc. SPIE, Vol. 6924 (2008).
2008
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Creating an Affordable 22Nm Node Using Design-lithography Co-optimization
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